1-[fluoro(dimethyl)silyl]-2,2,4,4,6,6-hexamethyl-3-(trimethylsilyl)-1,3,5,2,4,6-triazatrisilinane
CAS No. 68064-02-8
BRN 0838184 36934-37-9
G 605 3691-81-4
- 36927-82-9
AURORA 15994 369394-54-7